Direct observations of thermally induced structural changes in amorphous silicon carbide

Manabu Ishimaru, Akihiko Hirata, Muneyuki Naito, In Tae Bae, Yanwen Zhang, William J. Weber

研究成果: Article査読

37 被引用数 (Scopus)

抄録

Thermally induced structural relaxation in amorphous silicon carbide (SiC) has been examined by means of in situ transmission electron microscopy (TEM). The amorphous SiC was prepared by high-energy ion beam irradiation into a single crystalline 4H-SiC substrate. Cross-sectional TEM observations and electron energy-loss spectroscopy measurements revealed that thermal annealing induces a remarkable volume reduction, so-called densification, of amorphous SiC. From radial distribution function analyses using electron diffraction, notable changes associated with structural relaxation were observed in chemical short-range order. It was confirmed that the structural changes observed by the in situ TEM study agree qualitatively with those of the bulk material. On the basis of the alteration of chemical short-range order, we discuss the origin of thermally induced densification in amorphous SiC.

本文言語English
論文番号033503
ジャーナルJournal of Applied Physics
104
3
DOI
出版ステータスPublished - 2008 8月 25

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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