Direct Microrolling Processing on a Silicon Wafer
Kanna Aoki, Keita Ishiguro, Masaki Denokami, Yuya Tanahashi, Kentaro Furusawa, Norihiko Sekine, Tadafumi Adschiri, Minoru Fujii
研究成果: Article › 査読
2
被引用数
(Scopus)