Direct drawing of submicrom wiring by laser-induced pyrolysis of film prepared from liquid-dispersed metal nanoparticles

Akira Watanabe, Yoshio Kobayashi, Mikio Konno, Shinji Yamada, Takao Miwa

研究成果: Article査読

8 被引用数 (Scopus)

抄録

The direct-drawing of submicron Ag wiring was achieved by laser-induced pyrolysis (LIP) of a precursor film prepared from liquid-dispersed Ag nanoparticles. This new method provided the micro-wiring by wet and maskless process toward printed electronics. The linewith of the Ag wiring was easily controlled by changing the objective lens magnifications and the focusing point. The resistivity of the Ag wiring fabricated by this technique (1.910-6 cm) is comparable with that of bulk Ag (1.610-6 cm).

本文言語English
ページ(範囲)161/[743]-167/[749]
ジャーナルMolecular crystals and liquid crystals
464
1
DOI
出版ステータスPublished - 2006 3

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

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