Direct drawing of Ag microwiring by laser-induced pyrolysis of film prepared from liquid-dispersed metal nanoparticles

Akira Watanabe, Yoshio Kobayashi, Mikio Konno, Shinji Yamada, Takao Miwa

研究成果: Article査読

34 被引用数 (Scopus)

抄録

Ag microwiring with submicron resolution was fabricated by the laser-induced pyrolysis of a film prepared from liquid-dispersed Ag nanoparticles. The linewidth of the wiring fabricated by this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring fabricated by this technique (1.9 × 10-6 Ω cm) is comparable with that of bulk Ag (1.6 × Ω cm).

本文言語English
ページ(範囲)L740-L742
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
44
20-23
DOI
出版ステータスPublished - 2005 9 5

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(その他)
  • 物理学および天文学(全般)

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