Digital compensated capacitive pressure sensor using CMOS technology for low-pressure measurements

Tomio Nagata, Hiroaki Terabe, Sirou Kuwahara, Shizuki Sakurai, Osamu Tabata, Susumu Sugiyama, Masayoshi Esashi

研究成果: Article査読

13 被引用数 (Scopus)

抄録

A capacitive pressure sensor with digital output for low-pressure measurements has been fabricated using CMOS technology. The sensor output is compensated and adjusted by a newly developed method. The sensor has a hybrid configuration of an integrated sensor chip and a digital IC chip. Because of this configuration, the thermal sensitivity shift and thermal zero shift of the output are adjusted at the sensor chip, while the offset and full-scale span of the output are adjusted at the digital IC chip, independently. By using the new compensation and adjustment technique, a thermal sensitivity shift of 0.026% FS/°C and thermal zero shift of 0.013% FS/°C for a pressure range of 0-200 mm H2O (0-20.39 Pa) and a temperature range of 25-75 °C have been obtained. These characteristics using the new compensation method are about 1/7 and 1/4 of those obtained by using a conventional method. Furthermore, a humidity countermeasure is proposed.

本文言語English
ページ(範囲)173-177
ページ数5
ジャーナルSensors and Actuators: A. Physical
34
2
DOI
出版ステータスPublished - 1992 8

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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