A hard X-ray microbeam with zone plate optics has been tested, and preliminary experiments on scanning microscopy have been performed. A Fresnel zone plate fabricated by the electron-beam lithography technique is used as an X-ray focusing device. The material of the zone structure is tantalum with thickness of about 1 μm, and the outermost zone width of the zone plate is 0.25 μm. A focused spot size measured by knife-edge scanning is 0.3 μm at an X-ray energy of 8 keV. Closer evaluation of the spatial resolution has been done by observing resolution test patterns in a scanning X-ray microscopy experiment, and fine patterns with a 0.2 μ-structure have been resolved.
|ジャーナル||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版物ステータス||Published - 2001 3|
ASJC Scopus subject areas
- Physics and Astronomy(all)