Differential output type microflow sensor

Masayoshi Esashi, Hiroshi Kawai, Kenichi Yoshimi

研究成果: Article査読

1 被引用数 (Scopus)

抄録

To realize a flow sensor sensitive to a flow rate lower than 0.1 cc/min, a differential output‐type mass‐flow sensor with a pair of heaters was fabricated using the micromachining technique. In a conventional sensor with a single heater, sensitivity degradation occurs because of the natural convection around the heater. On the other hand, in the sensor in this study, the influence of the convection was eliminated by utilizing the differential outputs between the pair of heaters which were located closely together. As a result, the nonlinearity of the sensor was less than 2 percent even when the flow was lower than 0.1 cc/min.

本文言語English
ページ(範囲)83-88
ページ数6
ジャーナルElectronics and Communications in Japan (Part II: Electronics)
76
8
DOI
出版ステータスPublished - 1993 1 1

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Computer Networks and Communications
  • Electrical and Electronic Engineering

フィンガープリント 「Differential output type microflow sensor」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル