Diamond-particles levitated in a reactive plasma

Gouki Nishimura, Satoru Iizuka, Tetsuji Shimizu, Noriyoshi Sato

研究成果: Article査読

6 被引用数 (Scopus)

抄録

Dynamic behaviors of fine diamond-particles levitated in low-pressure plasmas are investigated. Fine diamond-particles injected into the plasma are charged up negatively and confined electrically above a radio frequency (RF) powered electrode at some vertical position where the gravity force acting on the particles balances with the electric force in the sheath region in front of the RF electrode. The average size of the diamond particles employed here is ∼2 μm. We observed that the diamond particles reveal strong motions in the lower-pressure discharge plasma. These motions are quite random and the equivalent kinetic temperature attained is ∼ 10 eV which is higher than the thermal level of the particles. The motion is gradually suppressed in the higher-pressure regime. The mechanisms of the diamond particle behaviors are discussed.

本文言語English
ページ(範囲)374-377
ページ数4
ジャーナルDiamond and Related Materials
12
3-7
DOI
出版ステータスPublished - 2003 3月 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 化学 (全般)
  • 機械工学
  • 材料化学
  • 電子工学および電気工学

フィンガープリント

「Diamond-particles levitated in a reactive plasma」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル