Diamond films grown on seeded substrates by hot-filament chemical vapour deposition with H2 as the only feeding gas

Hongwu Liu, Chengxin Wang, Chunxiao Gao, Yonghao Han, Jifeng Luo, Guangtian Zou, Chao Wen

研究成果: Article査読

1 被引用数 (Scopus)

抄録

Diamond films have been grown on polished Si substrates seeded with nanocrystalline diamond powder colloid using hot-filament chemical vapour deposition. Instead of using the conventional gaseous carbon source, a carbonized W filament was used as the carbon source. The only feeding gas was hydrogen. Compared with those produced by traditional methods, the polycrystalline diamond grown by this new method has smaller grain size. The growth mechanism is also discussed.

本文言語English
ページ(範囲)10969-10972
ページ数4
ジャーナルJournal of Physics Condensed Matter
14
44 SPEC ISS.
DOI
出版ステータスPublished - 2002 11 11

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学

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