Development of UV-curable resins suitable for reverse-Tone lithography for au metamaterials using a print-And-imprint method

Takuya Uehara, Shinya Sato, Shunya Ito, Haruna Yano, Takahiro Nakamura, Masaru Nakagawa

    研究成果: Article査読

    7 被引用数 (Scopus)

    抄録

    We developed a UV-curable resin (NL-SU1) suitable for screen printing with laser-drilled polyimide masks and reversetone nanoimprint lithography. The viscosity of the UV-curable resin composed of two bisphenol A-based monomers was adjusted to 11.0 Pas for the screen printing process. It was determined by photo-differential scanning calorimetry that photoinitiator Irgacure 369 was suitable for high methacrylate consumption in UV curing. The UV-curable resin after curing could be used as a top-coated resist layer on another imprinted resist layer because of its sufficient contrast in oxygen reactive ion etching and argon ion milling. We demonstrated a method for reverse-Tone lithography in a printand- imprint method to fabricate 20-nm-Thick and 50-nm-linewide Au split-ring resonator arrays.

    本文言語English
    ページ(範囲)178-186
    ページ数9
    ジャーナルBulletin of the Chemical Society of Japan
    91
    2
    DOI
    出版ステータスPublished - 2018

    ASJC Scopus subject areas

    • 化学 (全般)

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