Development of thermoelectric microdevices by combining materials processing and silicon micromachining technology

J. F. Li, R. Watanabe, S. Sugimoto, Shuji Tanaka, Masayoshi Esashi

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Thermoelectric microgenerators and microcoolers are becoming technologically important for microelectromechanical systems (MEMS), but the conventional cutting and assembling techniques have some limitation in miniaturizing the dimensions of thermoelectric devices to the micrometer order. We have combined powder processing and silicon micromachining to manufacture thermoelectric micro-modules with densely aligned fine and high-aspect-ratio P-N elements. Microrod arrays of 300□m tall and 40□m square of P-type Bi-Sb-Te thermoelectric alloy were successfully fabricated using the micromachined Si molds.

本文言語English
ホスト出版物のタイトルMechanics and Material Engineering for Science and Experiments
編集者Y. Zhou, Y. Ghu, Z. Li, Y. Zhou, Y. Gu, Z. Li
ページ205-208
ページ数4
出版ステータスPublished - 2003 10 17
イベントProceedings of the International Symposium of Young Scholars on Mechanics and Material Engineering for Science and Experiments - Changsha/Zhangjiajie, China
継続期間: 2001 8 112001 8 16

出版物シリーズ

名前Mechanics and Material Engineering for Science and Experiments

Other

OtherProceedings of the International Symposium of Young Scholars on Mechanics and Material Engineering for Science and Experiments
CountryChina
CityChangsha/Zhangjiajie
Period01/8/1101/8/16

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanical Engineering

フィンガープリント 「Development of thermoelectric microdevices by combining materials processing and silicon micromachining technology」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル