Development of scanning microwave microscope with a lumped-constant resonator probe for high-throughput characterization of combinatorial dielectric materials

Noriaki Okazaki, Hiroyuki Odagawa, Yasuo Cho, Toshihiko Nagamura, Daisuke Komiyama, Takashi Koida, Hideki Minami, Parhat Ahmet, Tomoteru Fukumura, Yuji Matsumoto, Masashi Kawasaki, Toyohiro Chikyow, Hideomi Koinuma, Tetsuya Hasegawa

研究成果: Article査読

22 被引用数 (Scopus)

抄録

A scanning microwave microscope (SμM) for combinatorial characterization of dielectric materials has been developed using a lumped-constant resonator probe. The probe consists of a commercially available microwave oscillator module equipped with a thin conducting needle and an outer conductor ring. The capacitance between needle and ring changes with the dielectric constant of the sample just beneath the needle, which can be detected as a frequency shift of the resonator with high accuracy. The frequency shift values measured for various standard samples lay on a master curve theoretically predicted, which guarantees the quantitative evaluation of the dielectric constant. Applicability of the present system to the characterization of combinatorial samples is demonstrated.

本文言語English
ページ(範囲)222-226
ページ数5
ジャーナルApplied Surface Science
189
3-4
DOI
出版ステータスPublished - 2002 4 28

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 物理学および天文学(全般)
  • 表面および界面
  • 表面、皮膜および薄膜

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