TY - JOUR
T1 - Development of scanning microwave microscope with a lumped-constant resonator probe for high-throughput characterization of combinatorial dielectric materials
AU - Okazaki, Noriaki
AU - Odagawa, Hiroyuki
AU - Cho, Yasuo
AU - Nagamura, Toshihiko
AU - Komiyama, Daisuke
AU - Koida, Takashi
AU - Minami, Hideki
AU - Ahmet, Parhat
AU - Fukumura, Tomoteru
AU - Matsumoto, Yuji
AU - Kawasaki, Masashi
AU - Chikyo, Toyohiro
AU - Koinuma, Hideomi
AU - Hasegawa, Tetsuya
PY - 2002/4/28
Y1 - 2002/4/28
N2 - A scanning microwave microscope (SμM) for combinatorial characterization of dielectric materials has been developed using a lumped-constant resonator probe. The probe consists of a commercially available microwave oscillator module equipped with a thin conducting needle and an outer conductor ring. The capacitance between needle and ring changes with the dielectric constant of the sample just beneath the needle, which can be detected as a frequency shift of the resonator with high accuracy. The frequency shift values measured for various standard samples lay on a master curve theoretically predicted, which guarantees the quantitative evaluation of the dielectric constant. Applicability of the present system to the characterization of combinatorial samples is demonstrated.
AB - A scanning microwave microscope (SμM) for combinatorial characterization of dielectric materials has been developed using a lumped-constant resonator probe. The probe consists of a commercially available microwave oscillator module equipped with a thin conducting needle and an outer conductor ring. The capacitance between needle and ring changes with the dielectric constant of the sample just beneath the needle, which can be detected as a frequency shift of the resonator with high accuracy. The frequency shift values measured for various standard samples lay on a master curve theoretically predicted, which guarantees the quantitative evaluation of the dielectric constant. Applicability of the present system to the characterization of combinatorial samples is demonstrated.
KW - Composition-spread thin film
KW - Dielectric constant
KW - Scanning microwave microscope
KW - Temperature-gradient pulsed laser deposition technique
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U2 - 10.1016/S0169-4332(01)01013-3
DO - 10.1016/S0169-4332(01)01013-3
M3 - Article
AN - SCOPUS:0037188089
VL - 189
SP - 222
EP - 226
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
IS - 3-4
ER -