Development of scanning microwave microscope for high-throughput characterization of combinatorial dielectric thin film

Noriaki Okazaki, Parhat Ahmet, Toyohiro Chikyow, Hiroyuki Odagawa, Yasuo Cho, Tomoteru Fukumura, Masashi Kawasaki, Makoto Ohtani, Hideomi Koinuma, Tetsuya Hasegawa

研究成果: Article査読

6 被引用数 (Scopus)

抄録

A scanning microwave microscope (SμM) for high-throughput characterization of combinatorial dielectric materials has been developed using a lumped constant resonator probe. The probe consists of a microwave oscillator module equipped with a thin conducting needle and an outer conductor ring, which detects the dielectric constant of the sample just beneath the needle as a frequency shift of the resonator. The quantitative analysis of the dielectric constant for the bulk and the thin-film samples was carried out based on the measurement of gap-length dependence of the frequency shift. The analysis method was successfully applied to the characterization of composition-spread BaxSr1-xTiO3 thin film sample. The evaluation of far-field contribution to the frequency shift was found to be crucial for the accurate determination of dielectric constant especially in the characterization of combinatorial thin films.

本文言語English
ページ(範囲)119-124
ページ数6
ジャーナルMaterials Research Society Symposium - Proceedings
700
出版ステータスPublished - 2002 1月 1
外部発表はい

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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