Development of multilayer laue lenses; (1) linear type

T. Koyama, H. Takenaka, S. Ichimaru, T. Ohchi, T. Tsuji, H. Takano, Y. Kagoshima

研究成果: Conference contribution

20 被引用数 (Scopus)

抄録

A multilayer Laue lens (MLL) made from MoSi2/Si has been fabricated aiming at a sub-10-nm spatial resolution for hard x-ray microscopy. A multilayer of 1000 alternating MoSi2 and Si layers with a layer thickness gradually increasing from 5 nm to 316 nm according to the Fresnel lens structure was deposited on a silicon substrate using DC magnetron sputtering, and then the substrate was diced, polished and thinned. The multilayer total thickness was about 10 μm. Optical properties were measured at the SPring-8 beamline BL24XU using 20-keV x-rays. While observing changes in far-field diffraction patterns by changing the tilt angle of the MLL, a dynamical diffraction effect of the MLL was visually confirmed. The achieved line focusing size was 13.1 nm, which is the best ever reported by using an MLL. The maximum local diffraction efficiency was measured to be 62%. Further, two MLLs were arranged in the KB configuration and applied to scanning transmission microscopy.

本文言語English
ホスト出版物のタイトル10th International Conference on X-Ray Microscopy
ページ24-27
ページ数4
DOI
出版ステータスPublished - 2010 12 1
外部発表はい
イベント10th International Conference on X-Ray Microscopy - Chicago, IL, United States
継続期間: 2010 8 152010 8 20

出版物シリーズ

名前AIP Conference Proceedings
1365
ISSN(印刷版)0094-243X
ISSN(電子版)1551-7616

Other

Other10th International Conference on X-Ray Microscopy
CountryUnited States
CityChicago, IL
Period10/8/1510/8/20

ASJC Scopus subject areas

  • Ecology, Evolution, Behavior and Systematics
  • Ecology
  • Plant Science
  • Physics and Astronomy(all)
  • Nature and Landscape Conservation

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