Development of high-throughput combinatorial terahertz time-domain spectrometer and its application to ternary composition-spread film

M. Ohtani, T. Hitosugi, Y. Hirose, J. Nishimura, A. Ohtomo, M. Kawasaki, R. Inoue, M. Tonouchi, T. Shimada, T. Hasegawa

    研究成果: Conference article › 査読

    5 被引用数 (Scopus)

    抄録

    We have developed a high-throughput combinatorial terahertz (THz) time-domain spectrometer (CTTDS) and applied to a ternary composition-spread film. This technique has possibilities to reveal a variety of physical properties such as complex refractive index, complex dielectric constant, and complex electrical conductivity. Further, this method is a non-contact and non-destructive way to map those physical properties. The demonstration of THz transmittance mapping of ternary composition-spread film, with a spatial resolution of 1 mm, reveals metallic behavior in specific range of film compositions. This prospective technique may serve as a convenient tool for the high-throughput, non-contact, non-destructive, and spatially resolved characterization suited for combinatorial composition-spread films.

    本文言語English
    ページ（範囲）2622-2627
    ページ数6
    ジャーナルApplied Surface Science
    巻252
    号7
    DOI
    出版ステータスPublished - 2006 1 21
    イベントProceedings of the Third Japan-US Workshop on Combinatorial Material Science and Technology CMST-e SI -
    継続期間: 2004 12 7 → 2004 12 10

    ASJC Scopus subject areas

    • Chemistry(all)
    • Condensed Matter Physics
    • Physics and Astronomy(all)
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films

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