Development of full-field x-ray phase-tomographic microscope based on laboratory x-ray source

Hidekazu Takano, Yanlin Wu, A. Momose

研究成果: Conference contribution

8 被引用数 (Scopus)

抄録

An X-ray phase tomographic microscope that can quantitatively measure the refractive index of a sample in three dimensions with a high spatial resolution was developed by installing a Lau interferometer consisting of an absorption grating and a π/2 phase grating into the optics of an X-ray microscope. The optics comprises a Cu rotating anode X-ray source, capillary condenser optics, and a Fresnel zone plate for the objective. The microscope has two optical modes: a large-field-of-view mode (field of view: 65 μm × 65 μm) and a high-resolution mode (spatial resolution: 50 nm). Optimizing the parameters of the interferometer yields a self-image of the phase grating with ∼60% visibility. Through the normal fringe-scanning measurement, a twin phase image, which has an overlap of two phase image of opposite contrast with a shear distance much larger than system resolution, is generated. Although artifacts remain to some extent currently when a phase image is calculated from the twin phase image, this system can obtain high-spatial-resolution images resolving 50-nm structures. Phase tomography with this system has also been demonstrated using a phase object.

本文言語English
ホスト出版物のタイトルDevelopments in X-Ray Tomography XI
編集者Ge Wang, Bert Muller
出版社SPIE
ISBN(電子版)9781510612396
DOI
出版ステータスPublished - 2017
イベントDevelopments in X-Ray Tomography XI 2017 - San Diego, United States
継続期間: 2017 8月 82017 8月 10

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
10391
ISSN(印刷版)0277-786X
ISSN(電子版)1996-756X

Other

OtherDevelopments in X-Ray Tomography XI 2017
国/地域United States
CitySan Diego
Period17/8/817/8/10

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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