Development of a vertical optical coupler using a slanted etching of InP/InGaAsP waveguide

Sunghan Choi, Akio Higo, Masaru Zaitsu, Myung Joon Kwack, Masakazu Sugiyama, Hiroshi Toshiyoshi, Yoshiaki Nakano

    研究成果: Letter査読

    3 被引用数 (Scopus)

    抄録

    We demonstrate a simple and efficient optical coupler for vertical coupling between optical fibers and InP-based waveguides using a slant-etched mirror. The angle of the etched mirror can be controlled by using an aluminum jig with a beveled surface inserted under the substrate during RIE (reactive ion etching) of InP/InGaAsP. The offchip coupler is fabricated simultaneously with a high-mesa waveguide with only one etching process. Coupling loss of 7.3 dB between the tapered single-mode fibers is obtained within the wavelength of 1530- 1570 nm.

    本文言語English
    ジャーナルIEICE Electronics Express
    10
    6
    DOI
    出版ステータスPublished - 2013 4 16

    ASJC Scopus subject areas

    • 電子材料、光学材料、および磁性材料
    • 凝縮系物理学
    • 電子工学および電気工学

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