We demonstrate a simple and efficient optical coupler for vertical coupling between optical fibers and InP-based waveguides using a slant-etched mirror. The angle of the etched mirror can be controlled by using an aluminum jig with a beveled surface inserted under the substrate during RIE (reactive ion etching) of InP/InGaAsP. The offchip coupler is fabricated simultaneously with a high-mesa waveguide with only one etching process. Coupling loss of 7.3 dB between the tapered single-mode fibers is obtained within the wavelength of 1530- 1570 nm.
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