Development of a three-axis angle sensor - Proposal of the measurement principle and identification experiments

Yusuke Saito, Yoshikazu Arai, Wei Gao

研究成果: Article査読

抄録

This paper describes a 3-axes angle sensor based on laser autocollimation for simultaneous measurement of small tilt angles about X, Y and Z-axes. The sensor consists of a laser diode as the light source and quadrant photodiodes (QPDs) as the optical position-sensing device. Differing from a conventional 2-axis autocollimator, the sensor uses a diffractive grating as the target mirror. It is verified that the sensitivity of the sensor in the θx (rolling) direction is determined by the pitch of the diffractive grating and the diameter of the laser beam. The sensitivities in the θy (pitching) and the 1 (yawing) direction are determined by the wavelength and the beam diameter of the laser beam. It is confirmed that the resolution of θx is about 0.2 arc-seconds, and those of θy and θ, are about 0.02 arc-seconds. Optical design and experimental results are presented.

本文言語English
ページ(範囲)997-1001
ページ数5
ジャーナルSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
74
9
DOI
出版ステータスPublished - 2008 9
外部発表はい

ASJC Scopus subject areas

  • Mechanical Engineering

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