This paper describes a 3-axes angle sensor based on laser autocollimation for simultaneous measurement of small tilt angles about X, Y and Z-axes. The sensor consists of a laser diode as the light source and quadrant photodiodes (QPDs) as the optical position-sensing device. Differing from a conventional 2-axis autocollimator, the sensor uses a diffractive grating as the target mirror. It is verified that the sensitivity of the sensor in the θx (rolling) direction is determined by the pitch of the diffractive grating and the diameter of the laser beam. The sensitivities in the θy (pitching) and the 1 (yawing) direction are determined by the wavelength and the beam diameter of the laser beam. It is confirmed that the resolution of θx is about 0.2 arc-seconds, and those of θy and θ, are about 0.02 arc-seconds. Optical design and experimental results are presented.
|ジャーナル||Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering|
|出版ステータス||Published - 2008 9|
ASJC Scopus subject areas
- Mechanical Engineering