Development of a new combinatorial mask for addressable ternary phase diagramming: Application to rare earth doped phosphors

R. Takahashi, H. Kubota, T. Tanigawa, M. Murakami, Y. Yamamoto, Y. Matsumoto, H. Koinuma

研究成果: Article査読

9 被引用数 (Scopus)

抄録

We report on the computer-aided design of a novel mask for the addressable ternary phase diagram to serve a quick screening of multi-component functional materials. Masking patterns were optimized to make a triangular ternary diagram with each composition changed from 0 to 100% by simulating the deposition process under the condition of synchronous control of the mask motion, target exchange, and laser pulses. Fabrication of a ternary M 0.01 Y 1.99 O 3 (M = Eu, Tm, Tb) phosphor material demonstrates of the direct mapping relationship between the film composition and its cathode luminescence (CL) property.

本文言語English
ページ(範囲)249-252
ページ数4
ジャーナルApplied Surface Science
223
1-3
DOI
出版ステータスPublished - 2004 2 15
外部発表はい

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 物理学および天文学(全般)
  • 表面および界面
  • 表面、皮膜および薄膜

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