Development of a microphotocantilever for near-field scanning optical microscopy

Shinya Akamine; Hiroki Kuwano; Kenji Fukuzawa; Hirofumi Yamada

Development of a microphotocantilever for near-field scanning optical microscopy

Shinya Akamine, Hiroki Kuwano, Kenji Fukuzawa, Hirofumi Yamada

研究成果: Paper › 査読

抄録

A new type of near-field scanning optical microscopy (NSOM) using a microcantilever with a photo diode on its tip is described. The photo-sensitive cantilever, called a microphotocantilever, was fabricated using micromachining techniques and its use demonstrated. Fine NSOM images below 20 nm are obtained. Atomic force microscopy (AFM) can be done simultaneously to NSOM using the microphotocantilever. Well correlated NSOM and AFM images are obtained in the near-field optical mode.

本文言語	English
ページ	145-150
ページ数	6
出版ステータス	Published - 1995 1 1
外部発表	はい
イベント	Proceedings of the 1995 IEEE Micro Electro Mechanical Systems Conference - Amsterdam, Neth 継続期間: 1995 1 29 → 1995 2 2

Other

Other	Proceedings of the 1995 IEEE Micro Electro Mechanical Systems Conference
City	Amsterdam, Neth
Period	95/1/29 → 95/2/2

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

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引用スタイル

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AU - Akamine, Shinya

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AU - Yamada, Hirofumi

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N2 - A new type of near-field scanning optical microscopy (NSOM) using a microcantilever with a photo diode on its tip is described. The photo-sensitive cantilever, called a microphotocantilever, was fabricated using micromachining techniques and its use demonstrated. Fine NSOM images below 20 nm are obtained. Atomic force microscopy (AFM) can be done simultaneously to NSOM using the microphotocantilever. Well correlated NSOM and AFM images are obtained in the near-field optical mode.

AB - A new type of near-field scanning optical microscopy (NSOM) using a microcantilever with a photo diode on its tip is described. The photo-sensitive cantilever, called a microphotocantilever, was fabricated using micromachining techniques and its use demonstrated. Fine NSOM images below 20 nm are obtained. Atomic force microscopy (AFM) can be done simultaneously to NSOM using the microphotocantilever. Well correlated NSOM and AFM images are obtained in the near-field optical mode.

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