Development of a microphotocantilever for near-field scanning optical microscopy

Shinya Akamine, Hiroki Kuwano, Kenji Fukuzawa, Hirofumi Yamada

研究成果: Paper査読

17 被引用数 (Scopus)

抄録

A new type of near-field scanning optical microscopy (NSOM) using a microcantilever with a photo diode on its tip is described. The photo-sensitive cantilever, called a microphotocantilever, was fabricated using micromachining techniques and its use demonstrated. Fine NSOM images below 20 nm are obtained. Atomic force microscopy (AFM) can be done simultaneously to NSOM using the microphotocantilever. Well correlated NSOM and AFM images are obtained in the near-field optical mode.

本文言語English
ページ145-150
ページ数6
出版ステータスPublished - 1995 1 1
外部発表はい
イベントProceedings of the 1995 IEEE Micro Electro Mechanical Systems Conference - Amsterdam, Neth
継続期間: 1995 1 291995 2 2

Other

OtherProceedings of the 1995 IEEE Micro Electro Mechanical Systems Conference
CityAmsterdam, Neth
Period95/1/2995/2/2

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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