A micro line-focus-beam (LFB) ultrasonic device was developed to improve the spatial resolution of the LFB ultrasonic material characterization (UMC) system. This device was demonstrated at 225 MHz with a wedge-shaped, slightly focused ultrasonic beam from a ZnO-film transducer fabricated on a large cylindro-convex surface with a 13-mm radius, not on the flat surface in a normal LFB ultrasonic device, and achieved over three-times improvement. We confirmed its ability to detect crystal anisotropy and to evaluate elastic inhomogeneity with steep variations using ZnO specimens. This device expands the potential of the LFB-UMC system for materials analyses.
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