Development of a metal-tip cantilever for noncontact atomic force microscopy

Kotone Akiyama, T. Eguchi, T. An, Y. Fujikawa, Y. Yamada-Takamura, T. Sakurai, Y. Hasegawa

研究成果: Article査読

39 被引用数 (Scopus)

抄録

We report on a focused-ion-beam fabrication of a metal-tip cantilever for noncontact atomic force microscopy (AFM) and demonstrate its superior performance by observing atomically resolved AFM images of the Si (111) 7×7 surface. Characterization of the tip apex by transmission electron microscope revealed that the tip radius is less than 5 nm. Detrimental changes in the resonance frequency and the Q factor of the cantilever due to the attachment of the metal tip are small and do not affect the performance of the AFM imaging. Since the fabrication technique is applicable to any materials, various functional probes can be developed with this method.

本文言語English
論文番号033705
ジャーナルReview of Scientific Instruments
76
3
DOI
出版ステータスPublished - 2005 3月
外部発表はい

ASJC Scopus subject areas

  • 器械工学

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