Development of a metal-tip cantilever for noncontact atomic force microscopy

Kotone Akiyama, T. Eguchi, T. An, Y. Fujikawa, Y. Yamada-Takamura, T. Sakurai, Y. Hasegawa

研究成果: Article

35 引用 (Scopus)

抜粋

We report on a focused-ion-beam fabrication of a metal-tip cantilever for noncontact atomic force microscopy (AFM) and demonstrate its superior performance by observing atomically resolved AFM images of the Si (111) 7×7 surface. Characterization of the tip apex by transmission electron microscope revealed that the tip radius is less than 5 nm. Detrimental changes in the resonance frequency and the Q factor of the cantilever due to the attachment of the metal tip are small and do not affect the performance of the AFM imaging. Since the fabrication technique is applicable to any materials, various functional probes can be developed with this method.

元の言語English
記事番号033705
ジャーナルReview of Scientific Instruments
76
発行部数3
DOI
出版物ステータスPublished - 2005 3 1
外部発表Yes

ASJC Scopus subject areas

  • Instrumentation

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  • これを引用

    Akiyama, K., Eguchi, T., An, T., Fujikawa, Y., Yamada-Takamura, Y., Sakurai, T., & Hasegawa, Y. (2005). Development of a metal-tip cantilever for noncontact atomic force microscopy. Review of Scientific Instruments, 76(3), [033705]. https://doi.org/10.1063/1.1865812