Development of a dielectric-barrier discharge enhanced microplasma jet

Shinya Kiriu, Hiroyuki Miyazoe, Fumitoshi Takamine, Masaki Sai, Jai Hyuk Choi, Takaaki Tomai, Kazuo Terashima

研究成果: Article査読

22 被引用数 (Scopus)

抄録

A low-power ultrahigh-frequency-driven inductively coupled microplasma (ICMP) source equipped with dielectric-barrier discharge (DBD) was developed to realize a low-temperature and high-density plasma in fine quartz capillaries with inner diameters of less than 1.0 mm. A stable plasma was generated and its sustainability was independent of the gas flow rate. This plasma jet had a longer plume than that of a thermoelectron-enhanced microplasma jet, and time-resolved characterization suggested interactions between ICMP and DBD jets. By optical emission spectroscopy characterization, the gas temperature and electron density inside a capillary were estimated to be 400-1000 K and 10 13 - 1014 cm-3, respectively.

本文言語English
論文番号191502
ジャーナルApplied Physics Letters
94
19
DOI
出版ステータスPublished - 2009
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(その他)

フィンガープリント

「Development of a dielectric-barrier discharge enhanced microplasma jet」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル