Development of a cryogenic stage for an ion-milling instrument

Masami Terauchi, Futami Satou, Hideo Sugizaki, Katsuaki Suganuma

    研究成果: Article査読

    3 被引用数 (Scopus)

    抄録

    A specimen-cooling device has been designed, manufactured and integrated into a commercial ion-milling instrument for transmission electron microscopy. The instrument enables us to prepare section specimens of tin-plated Cu without forming intermetallic compound particles and/or voids. The results show that cooling of specimen during ion-milling process is necessary for fine structure investigations of low melting temperature materials.

    本文言語English
    ページ(範囲)25-27
    ページ数3
    ジャーナルJournal of Electron Microscopy
    60
    1
    DOI
    出版ステータスPublished - 2011 2月

    ASJC Scopus subject areas

    • 器械工学

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