Development and prospects

Richard S. Muller, Wolfgang Menz, Masayoshi Esashi, Geoff Beardmore

研究成果: Chapter

抄録

This chapter includes 4 separate sections that were written by the prestigious scholars, Professor Richard S. Muller (University of California- Berkeley, USA), Professor Wolfgang Menz (University of Freiburg, Germany), Professor Masayoshi Esashi (Tohoku University, Japan), and Geoff Beardmore (Myraid Technology, UK). They shared their years of experience mainly in the development of MEMS and micro-nano technology, gave an overview of the history, development, and prospect of MEMS. Although from different perspectives, the prospect for MEMS is promising.

本文言語English
ホスト出版物のタイトルMicrosystems and Nanotechnology
出版社Springer-Verlag Berlin Heidelberg
ページ899-929
ページ数31
9783642182938
ISBN(電子版)9783642182938
ISBN(印刷版)3642182925, 9783642182921
DOI
出版ステータスPublished - 2012 8月 1

ASJC Scopus subject areas

  • 工学(全般)
  • 生化学、遺伝学、分子生物学(全般)

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