Determination of crystal polarity of piezoelectric thin film using scanning nonlinear dielectric microscopy

Satoshi Kazuta, Yasuo Cho, Hiroyuki Odagawa

研究成果: Paper査読

抄録

Using scanning nonlinear dielectric microscopy (SNDM) which we developed, we determined the polarities of ZnO thin films on various substrates including polar materials. In conventional methods based on detecting the piezoelectric and pyroelectric responses, it is very difficult to determine the polarities of thin films, particularly in the case of laying these films on the polar substrates, because the detected signals from thin films are very small and those from the substrates are large. Our SNDM method, however, enables us to determine the polarities of thin films on polar substrates easily. Using SNDM, the polarities of ZnO thin films on several kinds of polar and non-polar substrates were determined. We also determined experimentally that ZnO thin films grew with a sign opposite to the substrate polarity and it was suggested that pyroelectric effects mainly governed the polarity of ZnO films.

本文言語English
ページ983-986
ページ数4
出版ステータスPublished - 2000 12 1
イベント12th IEEE International Symposium on Applications of Ferroelectrics - Honolulu, HI, United States
継続期間: 2000 7 212000 8 2

Other

Other12th IEEE International Symposium on Applications of Ferroelectrics
CountryUnited States
CityHonolulu, HI
Period00/7/2100/8/2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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