抄録
Using scanning nonlinear dielectric microscopy (SNDM) which we developed, we determined the polarities of ZnO thin films on various substrates including polar materials. In conventional methods based on detecting the piezoelectric and pyroelectric responses, it is very difficult to determine the polarities of thin films, particularly in the case of laying these films on the polar substrates, because the detected signals from thin films are very small and those from the substrates are large. Our SNDM method, however, enables us to determine the polarities of thin films on polar substrates easily. Using SNDM, the polarities of ZnO thin films on several kinds of polar and non-polar substrates were determined. We also determined experimentally that ZnO thin films grew with a sign opposite to the substrate polarity and it was suggested that pyroelectric effects mainly governed the polarity of ZnO films.
本文言語 | English |
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ページ | 983-986 |
ページ数 | 4 |
出版ステータス | Published - 2000 12月 1 |
イベント | 12th IEEE International Symposium on Applications of Ferroelectrics - Honolulu, HI, United States 継続期間: 2000 7月 21 → 2000 8月 2 |
Other
Other | 12th IEEE International Symposium on Applications of Ferroelectrics |
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国/地域 | United States |
City | Honolulu, HI |
Period | 00/7/21 → 00/8/2 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 電子工学および電気工学