TY - JOUR
T1 - Detection of three-axis angles by an optical sensor
AU - Saito, Yusuke
AU - Arai, Yoshikazu
AU - Gao, Wei
N1 - Funding Information:
This research is financially supported by Mitutoyo Science Foundation and a grant-in-aid from Japan Society for the Promotion of Science (JSPS).
PY - 2009/3/25
Y1 - 2009/3/25
N2 - This article describes an optical method for measurement of three-axis angles (roll angle ΔθX, pitch angle ΔθY, yaw angle ΔθZ). The laser autocollimation method is improved from two-axis angle measurement to three-axis angle measurement by employing a diffraction grating instead of a plane mirror as the target reflector. The three-axis angle components can be calculated by three methods of using different diffraction light spots reflected from the diffraction grating. Method 1 uses three beams, which are the 0th-order and the ±1st-order diffraction light spots. Both Method 2 and Method 3 use two light spots. The former uses the ±1st-order diffraction light spots and the latter combines the 0th-order with the +1st-order or the -1st-order diffraction light spots. A prototype three-axis angle sensor is also designed and fabricated to compare the characteristics of the three methods from the viewpoints of sensitivity, linearity and resolution of the sensor output.
AB - This article describes an optical method for measurement of three-axis angles (roll angle ΔθX, pitch angle ΔθY, yaw angle ΔθZ). The laser autocollimation method is improved from two-axis angle measurement to three-axis angle measurement by employing a diffraction grating instead of a plane mirror as the target reflector. The three-axis angle components can be calculated by three methods of using different diffraction light spots reflected from the diffraction grating. Method 1 uses three beams, which are the 0th-order and the ±1st-order diffraction light spots. Both Method 2 and Method 3 use two light spots. The former uses the ±1st-order diffraction light spots and the latter combines the 0th-order with the +1st-order or the -1st-order diffraction light spots. A prototype three-axis angle sensor is also designed and fabricated to compare the characteristics of the three methods from the viewpoints of sensitivity, linearity and resolution of the sensor output.
KW - Angular motion error
KW - Diffraction grating
KW - Laser autocollimation method
KW - Pitch angle
KW - Roll angle
KW - Three-axis angle sensor
KW - Yaw angle
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U2 - 10.1016/j.sna.2008.12.019
DO - 10.1016/j.sna.2008.12.019
M3 - Article
AN - SCOPUS:61449180090
VL - 150
SP - 175
EP - 183
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
SN - 0924-4247
IS - 2
ER -