Detection of three-axis angles by an optical sensor

Yusuke Saito, Yoshikazu Arai, Wei Gao

研究成果: Article査読

47 被引用数 (Scopus)


This article describes an optical method for measurement of three-axis angles (roll angle ΔθX, pitch angle ΔθY, yaw angle ΔθZ). The laser autocollimation method is improved from two-axis angle measurement to three-axis angle measurement by employing a diffraction grating instead of a plane mirror as the target reflector. The three-axis angle components can be calculated by three methods of using different diffraction light spots reflected from the diffraction grating. Method 1 uses three beams, which are the 0th-order and the ±1st-order diffraction light spots. Both Method 2 and Method 3 use two light spots. The former uses the ±1st-order diffraction light spots and the latter combines the 0th-order with the +1st-order or the -1st-order diffraction light spots. A prototype three-axis angle sensor is also designed and fabricated to compare the characteristics of the three methods from the viewpoints of sensitivity, linearity and resolution of the sensor output.

ジャーナルSensors and Actuators, A: Physical
出版ステータスPublished - 2009 3月 25

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学


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