We developed an amorphous Ti-Si-O thin film without any harmful element. Studies of the cellular response to this amorphous layer show that its cytocompatibility is comparable to a pure Ti used as a reference material. Meanwhile, the deposition of this amorphous thin film on a patterned Si surface was found to effectively modify the cellular behaviors, including cell attachment and cell proliferation. The development of such biocompatible TiSiO thin film with no toxic element provides new insights into the potential applications of amorphous materials in biomedical fields.
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