Design issues for piezoresistive nanocantilever sensors with non-uniform nanoscale doping profiles

Yonggang Jiang, Masayoshi Esashi, Takahito Ono

研究成果: Article査読

抄録

A modeling method for piezoresitive nanocantilevers using their geometrical parameters is described. The spring constant and the effective mass of piezoresistive nanocantilevers are formulated using theoretical and approximation equations, which shows a good agreement with the results of finite element analysis. The displacement sensitivity and minmum detectable force of piezoresistive nanocantilevers with non-uniform doping profiles are calculated by introducing a piezoresistive efficiency factor.

本文言語English
ページ(範囲)270-271
ページ数2
ジャーナルIEEJ Transactions on Sensors and Micromachines
131
7
DOI
出版ステータスPublished - 2011

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学

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