This paper presents a design study of an XYZ three-axis micro stage which achieves a size of several cubic centimeters, a millimetric travel range, a nanometric driving resolution and three-axis motion at the same time. In addition, unique leaf springs acting not only as guides for a stage table but also as precision displacement sensors are included in the stage system. The XYZ three-axis micro stage is designed and fabricated. The fabricated stage is designed to have a small size of 25 mm (X) × 25 mm (Y) × 6.5 mm (Z). Furthermore, feasibility of the driving principle of the developed XYZ three-axis micro stage is verified in experiments.
|出版ステータス||Published - 2017 11月 13|
|イベント||9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan|
継続期間: 2017 11月 13 → 2017 11月 17
|Other||9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017|
|Period||17/11/13 → 17/11/17|
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