Design and verification of an XYZ three-axis micro stage

Keisuke Adachi, Takuma Sugawara, Yuki Shimizu, Yuan Liu Chen, Wei Gao, Eiji Niwa, Yoshihiro Sasaki

研究成果: Paper

抄録

This paper presents a design study of an XYZ three-axis micro stage which achieves a size of several cubic centimeters, a millimetric travel range, a nanometric driving resolution and three-axis motion at the same time. In addition, unique leaf springs acting not only as guides for a stage table but also as precision displacement sensors are included in the stage system. The XYZ three-axis micro stage is designed and fabricated. The fabricated stage is designed to have a small size of 25 mm (X) × 25 mm (Y) × 6.5 mm (Z). Furthermore, feasibility of the driving principle of the developed XYZ three-axis micro stage is verified in experiments.

本文言語English
出版ステータスPublished - 2017 11 13
イベント9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan
継続期間: 2017 11 132017 11 17

Other

Other9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
CountryJapan
CityHiroshima City
Period17/11/1317/11/17

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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