Design and testing of Omega mode imaging energy filters at 200 kV

K. Tsuno, T. Kaneyama, T. Honda, K. Tsuda, M. Terauchi, M. Tanaka

研究成果: Article査読

34 被引用数 (Scopus)


We designed and constructed an omega filter with following optical properties. The dispersions at 100 and 200 kV are 2.1 and 1.1 μm eV-1, respectively. Non-isochromatisity (difference of the selected energy between the centre and outer regions of an electron microscope image) is 1.3 and 2.5 eV at 100 and 200 kV, respectively, on a 25 mm diameter detector. The filter was installed and tested on a modified 200 kV high resolution TEM with an LaB6 cathode. Zero loss high resolution lattice image of [110]Si in thick specimen regions were clearly observed. Zero loss HOLZ CBED patterns of [111]Si were taken successfully up to 6.4°at an accelerating voltage of 100 kV. Since the slit was inserted to cut 17 eV first plasmon loss of Si, the maximum observable angle limited by the non-isochromatisity is 6.8°, which agrees with the experimental 6.4°. Based on these results, a new omega filter with a non-isochromatisity of 0.9 eV on the diameter 25 mm at 200 kV was designed.

ジャーナルJournal of Electron Microscopy
出版ステータスPublished - 1997

ASJC Scopus subject areas

  • 器械工学


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