Design and testing of a compact non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings

Yuki Shimizu, Ryo Aihara, Kazuki Mano, Chong Chen, Yuanliu Chen, Xiuguo Chen, Wei Gao

研究成果: Article査読

16 被引用数 (Scopus)

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