Design and preparation of a 33-layer optical reflection filter of TiO2-SiO2 system

Xinrong Wang; Hiroshi Masumoto; Yoshihiro Someno; Lidong Chen; Toshio Hirai

doi:10.1116/1.582278

Design and preparation of a 33-layer optical reflection filter of TiO₂-SiO₂ system

Xinrong Wang, Hiroshi Masumoto, Yoshihiro Someno, Lidong Chen, Toshio Hirai

学際科学フロンティア研究所・先端学際基幹研究部

研究成果: Article › 査読

9 被引用数 (Scopus)

抄録

The influences of the number of layers and the function of graded refractive index profiles on the profiles on the optical characteristics of a 33-layer optical reflection filters of TiO₂-SiO₂ system were investigated. The structure and the optical properties of the prepared films were in good agreement with the designed filter.

本文言語	English
ページ（範囲）	933-937
ページ数	5
ジャーナル	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
巻	18
号	3
DOI	https://doi.org/10.1116/1.582278
出版ステータス	Published - 2000 5

ASJC Scopus subject areas

凝縮系物理学
表面および界面
表面、皮膜および薄膜

文献へのアクセス

10.1116/1.582278

他のファイルとリンク

引用スタイル

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author = "Xinrong Wang and Hiroshi Masumoto and Yoshihiro Someno and Lidong Chen and Toshio Hirai",

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