In this paper, we describe a directional thin-film silicon photodetector with the objective of optical micro-encoder application. A directional photodetector with high absorption efficiency at a specific angle of incident light is based on guided-mode resonance (GMR) of sub wavelength grating. The sensitive direction is tunable by changing the grating period. Numerical analysis, fabrication and device performance are presented.
|ジャーナル||IEEJ Transactions on Sensors and Micromachines|
|出版ステータス||Published - 2007|
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