Design and fabrication of a thin-film silicon photodetector with angular sensitivity for optical micro-encoder

研究成果: Article査読

2 被引用数 (Scopus)

抄録

In this paper, we describe a directional thin-film silicon photodetector with the objective of optical micro-encoder application. A directional photodetector with high absorption efficiency at a specific angle of incident light is based on guided-mode resonance (GMR) of sub wavelength grating. The sensitive direction is tunable by changing the grating period. Numerical analysis, fabrication and device performance are presented.

本文言語English
ページ(範囲)309-313+1
ジャーナルIEEJ Transactions on Sensors and Micromachines
127
6
出版ステータスPublished - 2007

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学

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