Design and fabrication of a miniaturized three-degree-of-freedom piezoresistive acceleration sensor based on MEMS technology using deep reactive ion etching

Vu Ngoc Hung, Nguyen Van Minh, Le Van Minh, Nguyen Huu Hung, Chu Manh Hoang, Dzung Viet Dao, Ranjith Amarasinghe, Bui Thanh Tung, Susumu Sugiyama

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper presents the design and the fabrication of a miniaturized three-degree-of-freedom piezoresistive acceleration sensor based on MEMS technology using deep reactive ion etching. Finite element method (FEM) using the ANSYS program has been applied to study the mechanical and electrical behavior of the device. The fabricated sensor with the dimension 1 × 1 × 0.45 mm3 can detect simultaneously three components of the linear acceleration at the frequency bandwidth 100 Hz.

本文言語English
ホスト出版物のタイトルPhysics and Engineering of New Materials
編集者H.C.Klaus Wandelt, Do Tran Cat, Annemarie Pucci
出版社Springer Science and Business Media, LLC
ページ377-383
ページ数7
ISBN(印刷版)9783540882008
DOI
出版ステータスPublished - 2009
外部発表はい
イベント10th German-Vietnamese Seminar on Physics and Engineering, GVS 2007 - Bonn, Germany
継続期間: 2007 6月 62007 6月 9

出版物シリーズ

名前Springer Proceedings in Physics
127
ISSN(印刷版)0930-8989
ISSN(電子版)1867-4941

Other

Other10th German-Vietnamese Seminar on Physics and Engineering, GVS 2007
国/地域Germany
CityBonn
Period07/6/607/6/9

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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