TY - JOUR
T1 - Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition
AU - Katayama, M.
AU - Itaka, K.
AU - Matsumoto, Y.
AU - Koinuma, H.
N1 - Funding Information:
This work was supported by the Japan Science and Technology Agency.
Copyright:
Copyright 2019 Elsevier B.V., All rights reserved.
PY - 2006/1/21
Y1 - 2006/1/21
N2 - We have designed a compact combinatorial pulsed laser deposition (PLD) chamber as a building block of a desktop laboratory for advanced materials research. Development of small-size systems for the growth and characterization of films would greatly help in interconnecting a variety of analytical tools for rapid screening of advanced materials. This PLD chamber has four special features: (1) a drum-shaped growth chamber, (2) a waterwheel-like combinatorial masking system, (3) a multi-target system having one feedthrough, and (4) a small reflection high-energy electron diffraction (RHEED) system. The performance of this system is demonstrated by the RHEED intensity oscillation during homoepitaxial growth of SrTiO 3 as well as by simultaneous fabrication of a ternary phase diagram of rare earth-doped Y 2 O 3 phosphors.
AB - We have designed a compact combinatorial pulsed laser deposition (PLD) chamber as a building block of a desktop laboratory for advanced materials research. Development of small-size systems for the growth and characterization of films would greatly help in interconnecting a variety of analytical tools for rapid screening of advanced materials. This PLD chamber has four special features: (1) a drum-shaped growth chamber, (2) a waterwheel-like combinatorial masking system, (3) a multi-target system having one feedthrough, and (4) a small reflection high-energy electron diffraction (RHEED) system. The performance of this system is demonstrated by the RHEED intensity oscillation during homoepitaxial growth of SrTiO 3 as well as by simultaneous fabrication of a ternary phase diagram of rare earth-doped Y 2 O 3 phosphors.
KW - Combinatorial mask
KW - Combinatorial synthesis
KW - Phosphors
KW - Pulsed laser deposition
KW - Reflection high-energy electron diffraction
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U2 - 10.1016/j.apsusc.2005.06.042
DO - 10.1016/j.apsusc.2005.06.042
M3 - Conference article
AN - SCOPUS:31144477841
VL - 252
SP - 2461
EP - 2465
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
IS - 7
T2 - Proceedings of the Third Japan-US Workshop on Combinatorial Material Science and Technology CMST-e SI
Y2 - 7 December 2004 through 10 December 2004
ER -