Design and construction of the motion mechanism of an XY micro-stage for precision positioning

Yuki Shimizu; Yuxin Peng; Junji Kaneko; Toyohiro Azuma; So Ito; Wei Gao; Tien Fu Lu

doi:10.1016/j.sna.2013.08.012

Design and construction of the motion mechanism of an XY micro-stage for precision positioning

Yuki Shimizu, Yuxin Peng, Junji Kaneko, Toyohiro Azuma, So Ito, Wei Gao, Tien Fu Lu

工学研究科・ファインメカニクス専攻

研究成果: Article › 査読

43 被引用数 (Scopus)

抄録

A motion mechanism of an XY micro-stage is designed and constructed for precision positioning of light weight objects. A driving unit, which consists of two PZTs and a friction component made by permanent magnet, is mounted on the center of the stage base for driving the stage moving plate made by steel in the X- and Y-directions based on a friction drive. The moving plate is attached on the friction component by the magnetic force. Leaf springs are employed to guide the X- and Y-directional motions of the moving plate over a range of ±1 mm in both directions. The stage motion mechanism, which dominates the overall size of XY micro-stage, has a compact size of 24 mm (X) × 24 mm (Y) × 5 mm (Z). The basic performances of the stage motion mechanism have been investigated by experiments.

本文言語	English
ページ（範囲）	395-406
ページ数	12
ジャーナル	Sensors and Actuators, A: Physical
巻	201
DOI	https://doi.org/10.1016/j.sna.2013.08.012
出版ステータス	Published - 2013 9 10

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

文献へのアクセス

10.1016/j.sna.2013.08.012

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引用スタイル

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abstract = "A motion mechanism of an XY micro-stage is designed and constructed for precision positioning of light weight objects. A driving unit, which consists of two PZTs and a friction component made by permanent magnet, is mounted on the center of the stage base for driving the stage moving plate made by steel in the X- and Y-directions based on a friction drive. The moving plate is attached on the friction component by the magnetic force. Leaf springs are employed to guide the X- and Y-directional motions of the moving plate over a range of ±1 mm in both directions. The stage motion mechanism, which dominates the overall size of XY micro-stage, has a compact size of 24 mm (X) × 24 mm (Y) × 5 mm (Z). The basic performances of the stage motion mechanism have been investigated by experiments.",

keywords = "Impact drive mechanism, Long stroke, Magnet, PZT, Precision positioning, XY micro-stage",

author = "Yuki Shimizu and Yuxin Peng and Junji Kaneko and Toyohiro Azuma and So Ito and Wei Gao and Lu, {Tien Fu}",

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AU - Shimizu, Yuki

AU - Peng, Yuxin

AU - Kaneko, Junji

AU - Azuma, Toyohiro

AU - Ito, So

AU - Gao, Wei

AU - Lu, Tien Fu

PY - 2013/9/10

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