TY - JOUR
T1 - Design and construction of the motion mechanism of an XY micro-stage for precision positioning
AU - Shimizu, Yuki
AU - Peng, Yuxin
AU - Kaneko, Junji
AU - Azuma, Toyohiro
AU - Ito, So
AU - Gao, Wei
AU - Lu, Tien Fu
PY - 2013/9/10
Y1 - 2013/9/10
N2 - A motion mechanism of an XY micro-stage is designed and constructed for precision positioning of light weight objects. A driving unit, which consists of two PZTs and a friction component made by permanent magnet, is mounted on the center of the stage base for driving the stage moving plate made by steel in the X- and Y-directions based on a friction drive. The moving plate is attached on the friction component by the magnetic force. Leaf springs are employed to guide the X- and Y-directional motions of the moving plate over a range of ±1 mm in both directions. The stage motion mechanism, which dominates the overall size of XY micro-stage, has a compact size of 24 mm (X) × 24 mm (Y) × 5 mm (Z). The basic performances of the stage motion mechanism have been investigated by experiments.
AB - A motion mechanism of an XY micro-stage is designed and constructed for precision positioning of light weight objects. A driving unit, which consists of two PZTs and a friction component made by permanent magnet, is mounted on the center of the stage base for driving the stage moving plate made by steel in the X- and Y-directions based on a friction drive. The moving plate is attached on the friction component by the magnetic force. Leaf springs are employed to guide the X- and Y-directional motions of the moving plate over a range of ±1 mm in both directions. The stage motion mechanism, which dominates the overall size of XY micro-stage, has a compact size of 24 mm (X) × 24 mm (Y) × 5 mm (Z). The basic performances of the stage motion mechanism have been investigated by experiments.
KW - Impact drive mechanism
KW - Long stroke
KW - Magnet
KW - PZT
KW - Precision positioning
KW - XY micro-stage
UR - http://www.scopus.com/inward/record.url?scp=84883484408&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84883484408&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2013.08.012
DO - 10.1016/j.sna.2013.08.012
M3 - Article
AN - SCOPUS:84883484408
VL - 201
SP - 395
EP - 406
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
SN - 0924-4247
ER -