Two aspects of the elastic recoil detection technique for analyzing H and D are described; i) experimental factors which effectively limit the depth resolution in Al film, and ii) determination of the recoil cross section for H(4He, 4He)H and D(4He, 4He)D reactions in the range of 1.5-3.0 MeV energy of 4He. Both experimental and theoretical estimates of the depth resolution are presented and are in good agreement each other. The theoretical estimate therefore provides a reliable guide to find optimum resolution conditions. The recoil cross section for H is more than double the theoretical Rutherford scattering value and that for D becomes greater than 30 times Rutherford near the resonance energy of 2.1 MeV 4He.
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