Deposition of PZT thin films by hybrid process comprising sol-gel method and laser ablation for microscanners

Z. J. Wang, J. Tsaur, R. Maeda, H. Kokawa

研究成果: Paper査読

1 被引用数 (Scopus)

抄録

Lead zirconate titanate (Pb(Zr0.52Ti0.48)O 3: PZT) thin films were prepared on Pt/Ti/SiO2/Si substrates by hybrid processing: sol-gel method and laser ablation. The preferred orientation of the PZT films obtained by the hybrid process can be controlled using the seed layer obtained by the sol-gel method. The remnant polarization and the coercive field of this film were 28.6 μC/cm2 and 58.0 kV/cm, while the dielectric constant and loss values measured at 1 kHz were approximately 1050 and 0.045, respectively. The devices of micro mirrors were successfully fabricated through the PZT film deposition, lithography cyclotron resonance (ECR), reactive ion etching (RIE) and inductively coupled plasma (ICP) releasing processes. The scanning angle was about 6 ± 2 degrees by resonating two beams with AC 5Vp-p at the resonance frequency of 1975 Hz. The results indicated that the piezoelectric PZT films deposited by the hybrid process have sufficient actuation capability for MEMS application.

本文言語English
ページ169-172
ページ数4
出版ステータスPublished - 2005 12 6
イベント2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S) - Montreal, Canada
継続期間: 2004 8 232004 8 27

Other

Other2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S)
国/地域Canada
CityMontreal
Period04/8/2304/8/27

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

フィンガープリント

「Deposition of PZT thin films by hybrid process comprising sol-gel method and laser ablation for microscanners」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル