Deposition of conductivity-switching polyimide film by molecular layer deposition and electrical modification using scanning probe microscope

S. Yoshida, T. Ono, M. Esashi

研究成果: Article査読

18 被引用数 (Scopus)

抄録

This Letter reports on the deposition of a conductivity-switching polyimide film as a recording medium formed by molecular layer deposition (MLD). It also reports on the electrical modification on it using a scanning probe microscope (SPM). The polyimide film is uniformly deposited on an Au surface by MLD. As the result of the electrical modification, highly conductive dots pattern with a narrow pitch of approximately 50nm is successfully defined by applying pulsed voltages. The current ratio of the electrical modified area to unmodified area reached 300 at least.

本文言語English
ページ(範囲)321-323
ページ数3
ジャーナルMicro and Nano Letters
5
5
DOI
出版ステータスPublished - 2010 10

ASJC Scopus subject areas

  • Bioengineering
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

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