Piezoelectric properties of ZnO films, were investigated by using an Electron Cyclotron Resonance (ECR) sputtering system. It was confirmed that this system was capable of depositing a ZnO film with a large specific resistance, and good c-axis orientation on an interdigital transducer (IDT)/glass substrate at a low temperature (less than 200°C) and in a low gas pressure (~10-4 torr). Furthermore these ZnO films exhibited excellent SAW characteristics (insertion losses) and effective electromechanical coupling factors (keff) compared with ZnO films deposited by a conventional RF magnetron sputtering system. Further, this ECR sputtering system was capable of depositing a ZnO film, without heating the substrate, that was capable of propagating a Rayleigh SAW at 700 MHz for the first time.
|ジャーナル||IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control|
|出版ステータス||Published - 1994 7|
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