Deposition and Piezoelectric Characteristics of ZnO Films by Using an ECR Sputtering System

Michio Kadota, Toru Kasanami, Makoto Minakata

研究成果: Article査読

12 被引用数 (Scopus)

抄録

Piezoelectric properties of ZnO films, were investigated by using an Electron Cyclotron Resonance (ECR) sputtering system. It was confirmed that this system was capable of depositing a ZnO film with a large specific resistance, and good c-axis orientation on an interdigital transducer (IDT)/glass substrate at a low temperature (less than 200°C) and in a low gas pressure (~10-4 torr). Furthermore these ZnO films exhibited excellent SAW characteristics (insertion losses) and effective electromechanical coupling factors (keff) compared with ZnO films deposited by a conventional RF magnetron sputtering system. Further, this ECR sputtering system was capable of depositing a ZnO film, without heating the substrate, that was capable of propagating a Rayleigh SAW at 700 MHz for the first time.

本文言語English
ページ(範囲)479-483
ページ数5
ジャーナルIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
41
4
DOI
出版ステータスPublished - 1994 7
外部発表はい

ASJC Scopus subject areas

  • 器械工学
  • 音響学および超音波学
  • 電子工学および電気工学

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