Dependence of magnetic properties of MgO/CoFeB/Ta stacks on CoFeB and Ta thicknesses

Kyota Watanabe, Shinya Ishikawa, Hideo Sato, Shoji Ikeda, Michihiko Yamanouchi, Shunsuke Fukami, Fumihiro Matsukura, Hideo Ohno

研究成果: Article査読

6 被引用数 (Scopus)

抄録

We investigate the dependence of magnetic properties of MgO/CoFeB/Ta stacks on thicknesses of CoFeB ranging from 2 to 30 nm and Ta from 1 to 10nm before and after annealing at 300-400 °C for 1-3 h. The annealing increases the saturation magnetic moment per unit area and reduces the magnitude of the damping constant in CoFeB. The annealing effect becomes smaller with increasing CoFeB thickness and with decreasing Ta thickness, indicating that the effect is related to B diffusion from CoFeB to Ta. We show that the amount of diffused B can be controlled by Ta layer thickness and annealing duration.

本文言語English
論文番号04DM04
ジャーナルJapanese journal of applied physics
54
4
DOI
出版ステータスPublished - 2015 4 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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