Degradation of perovskite Pb(Zr,Ti)O3 thin films fabricated by pulsed laser ablation

Yoichiro Masuda, Shigetaka Fujita, Takashi Nishida, Hiroshi Masumoto, Toshio Hirai

研究成果: Paper査読

7 被引用数 (Scopus)

抄録

Ferroelectric thin films of Pb(Zr,Ti)O3 (PZT) were prepared on platinum (Pt) and SrRuO3 (SRO) thin film electrodes by the fourth harmonic wave (λ = 266 nm) of a pulsed Nd3+:YAG laser ablation technique. Ferroelectric degradation of ferroelectric thin film capacitors is investigated. As the results, the remanent polarization value of PZT films deposited on an SRO electrode as a buffer layer is remained constantly more than 1011 switching cycles. It is confirmed that polarization switching degradation is improved by using an SRO thin film electrode as a buffer layer.

本文言語English
ページ23-26
ページ数4
出版ステータスPublished - 1998 12 1
外部発表はい
イベントProceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI) - Montreaux, Switz
継続期間: 1998 8 241998 8 27

Other

OtherProceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI)
CityMontreaux, Switz
Period98/8/2498/8/27

ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)

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