Dc self-bias voltages in radio frequency magnetron discharges

S. Yonemura, K. Nanbu

研究成果: Article査読

7 被引用数 (Scopus)

抄録

The dc self-bias voltage of RF planar magnetron discharges of argon gas was clarified by performing particle-in-cell/Monte Carlo (PIC/MC) simulations. The self-bias increased with increasing magnetic field and became positive. This dependence of self-bias on the magnetic field agrees with the experimental result, the theoretical result, and the numerical result of fluid simulation on magnetically enhanced capacitively coupled plasma with a magnetic field parallel to the electrode surface. The plasma was confined between the magnetic poles for a narrow gap (≤ 30 mm), but spread over a large space for a larger gap.

本文言語English
ページ(範囲)517-521
ページ数5
ジャーナルThin Solid Films
506-507
DOI
出版ステータスPublished - 2006 5 26

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 表面および界面
  • 表面、皮膜および薄膜
  • 金属および合金
  • 材料化学

フィンガープリント

「Dc self-bias voltages in radio frequency magnetron discharges」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル