Czochralski growth of UV-grade CaF2 single crystals using ZnF2 additive as scavenger

J. M. Ko, S. Tozawa, A. Yoshikawa, K. Inaba, T. Shishido, T. Oba, Y. Oyama, T. Kuwabara, T. Fukuda

研究成果: Article査読

23 被引用数 (Scopus)

抄録

CaF2 single crystals suitable for excimer laser application in the ultraviolet range were grown by the Czochralski method. ZnF2 additive and CF4 gas were successfully used as scavengers for removing the water molecules in the growth environment, which otherwise cause various defects such as subgrain boundaries, bubbles and oxygen-related precipitates in the CaF2 crystal. Czochralski-grown CaF2 crystals had very good crystallinity and a high transmittance in the wavelength range of the ultraviolet laser. The defect structures of colored and colorless CaF2 crystals were compared.

本文言語English
ページ(範囲)243-248
ページ数6
ジャーナルJournal of Crystal Growth
222
1-2
DOI
出版ステータスPublished - 2001 1

ASJC Scopus subject areas

  • 凝縮系物理学
  • 無機化学
  • 材料化学

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