Crystallographic orientation dependence of compositional transition and valence band offset at SiO2/Si interface formed using oxygen radicals

T. Suwa, Akinobu Teramoto, Y. Kumagai, K. Abe, X. Li, Y. Nakao, M. Yamamoto, Y. Kato, T. Muro, T. Kinoshita, T. Ohmi, Takeo Hattori

研究成果: Article査読

8 被引用数 (Scopus)

抄録

The chemical and electronic-band structures of SiO2 /Si interfaces formed utilizing oxygen radicals were investigated by measuring angle-resolved photoelectron spectra arising from Si 2p and O1s core levels and a valence band with the same probing depth. We clarified that (1) the SiO 2 /Si interfaces formed exhibited an almost abrupt compositional transition, (2) the valence band offsets at the Si(111)/Si, Si(110)/Si, and Si(551)/Si interfaces are almost the same and are 0.07 eV smaller than that at the SiO2 /Si (100) interface.

本文言語English
論文番号173103
ジャーナルApplied Physics Letters
96
17
DOI
出版ステータスPublished - 2010 4月 26

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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