Crystallographic investigation of aluminium nitride thin films on stainless steel foil for highly efficient piezoelectric vibration energy harvesters

N. Moriwaki, L. V. Minh, R. Ohigashi, O. Shimada, H. Kitayoshi, H. Kuwano

研究成果: Conference article査読

6 被引用数 (Scopus)

抄録

This study reports piezoelectric properties and crystallographic microstructures of aluminium nitride (AlN, wurtzite structure) thin films on 50 μm thick stainless steel foil. The transverse piezoelectric coefficient d31f and e31f of 10 pm thick AlN films were estimated as -1.42 0.08 μm/V and -0.48 0.03 C/m2 from a tip displacement of the piezoelectric cantilevers. Dielectric constant s33 was measured as 10.5 1.0. An electron beam diffraction pattern by a high-resolution transmission electron microscope and x-ray diffraction pattern showed that abundance ratio of the orientation such as <101>, <102> and <103> of AlN crystal on stainless steel foils increased with increasing thickness.

本文言語English
論文番号012049
ジャーナルJournal of Physics: Conference Series
773
1
DOI
出版ステータスPublished - 2016 12 14
イベント16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2016 - Paris, France
継続期間: 2016 12 62016 12 9

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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