We have prepared Ti1-xCx (x=0.5-0.9) thin films by co-sputtering, and investigated their crystallization behavior by in-situ transmission electron microscopy. Only Ti0.1C0.9 exhibited a single phase amorphous state; while films with other compositions were found to be a mixture of the fee TiC phase and a carbon-based amorphous phase. Annealing of the Ti0.1C0.9 film at 400°C brought about the precipitation of the TiC particles of 30-40 nm within the amorphous carbon matrix. Upon further annealing at 500°C, these particles were found to grow abnormally, exhibiting rod-like morphology of about μm in length with  preferred orientation. The activation energy for growth was about 4.0eV. These findings were compared with the behavior of Co-C films; similarities were discussed from thermodynamical and kinetic points of view.
|ジャーナル||Journal of Metastable and Nanocrystalline Materials|
|出版ステータス||Published - 2005|
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