Cr-N strain-gauge-type precision displacement sensor for measuring positions of micro stage

Toyohiro Azuma, Eiji Niwa, Yuxin Peng, Junji Kaneko, Yuki Shimizu, So Ito, Wei Gao

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

A strain-gauge-type precision displacement sensor, which is developed for the positioning of a micro-XY stage, is described in this paper. A thin-film strain-gauge element, which is made of Cr-N alloy, is directly fabricated on a ceramic base plate by using photolithography processes to achieve higher sensitivity and better thermal stability for the detection of the stage displacement. In this study, several designs of the thin-film strain gauge including both two-gauge type and four-gauge type are fabricated to investigate sensor performances such as sensitivity, stability and so on. Details of the design, fabrication and evaluation results of the Cr-N strain-gauge-type displacement sensor are described.

本文言語English
ホスト出版物のタイトルEmerging Technology in Precision Engineering XIV
出版社Trans Tech Publications Ltd
ページ939-944
ページ数6
ISBN(印刷版)9783037855096
DOI
出版ステータスPublished - 2012
イベント14th International Conference on Precision Engineering, ICPE 2012 - Hyogo, Japan
継続期間: 2012 11 82012 11 10

出版物シリーズ

名前Key Engineering Materials
523-524
ISSN(印刷版)1013-9826
ISSN(電子版)1662-9795

Other

Other14th International Conference on Precision Engineering, ICPE 2012
国/地域Japan
CityHyogo
Period12/11/812/11/10

ASJC Scopus subject areas

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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