Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices

Satoru Matsuda, Motoaki Hara, Michio Miura, Takashi Matsuda, Masanori Ueda, Yoshio Satoh, Ken Ya Hashimoto

    研究成果: Article査読

    19 被引用数 (Scopus)

    フィンガープリント

    「Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

    Engineering & Materials Science

    Physics & Astronomy